ALMERE, The Netherlands
June 10, 2013

ASM International N.V. (NASDAQ: ASMI and Euronext Exchange in Amsterdam: ASM) today announced that it will be hosting a technical seminar in Kyoto, Japan, on Thursday, June 13, 2013 in conjunction with the IEEE International Interconnect Technology Conference (IITC) and Symposia on VLSI Technology and Circuits.

In this technology seminar ASM will highlight advanced Plasma Enhanced ALD techniques suitable for low temperature dielectric applications and will present a guest speaker, highly regarded in this field, who will address leading edge plasma processing innovations.

The agenda is as follows:

06:30-07:00 pm - Welcome drinks


07:00-07:20 pm - Ivo Raaijmakers (CTO ASM) - PEALD as an enabler for 10nm technology


07:20-08:00 pm - Prof. Masaru Hori (Plasma Nanotechnology Research Center, Nagoya University) - "Leading-edge diagnostic techniques and fundamental researches for plasma processing innovations"

Following the presentations, there will be an open dialogue around the presentation topics.

08:00-09:00 pm Food and drinks

The ASM technology seminar includes dinner and will take place in the Atrium (1F), Eastern Zone at the Kyoto Research Park Corp., 134, Chudoji Minami-machi, Shimogyo-ku, Kyoto 600-8813, Japan. The room will open at 06:30 pm for invited attendees. Interested parties should contact Rosanne de Vries, +31 (0)8810-08569, rosanne.de.vries@asm.com:
mailto:rosanne.de.vries@asm.com